Introduction to Autonix pressure sensor technology

Create Date: 2024-8-30 12:03:23|Source: Autonics/Autonics

1. Capacitive Capacitive pressure sensors are usually cleaned by a large number of OEM professional applications, testing the capacitance change between two surfaces, so that these sensors can sense the extreme pressure and vacuum level. In our typical sensor setup, the compact outer gram contains two metal surfaces, the gold country surface rain space tight, parallel, and electrically dissociated, one in essence, capable of subtle curvature under pressure. In order to change the inter-courtyard between the group, these fixed surfaces (plates (which actually form variable appliances) were installed. Height changes detected by a sensitive linear comparator circuit (or ASIC).

                               Introduction to Autonix pressure sensor technology

2. CVD type chemistry and phase stacking domain CVD") fabrication method attaches polycrystalline wow layer meal to a stainless steel film at the molecular level, so as to produce a sensing with excellent long-term ticket transfer energy, and the commonly used batch semiconductor manufacturing method is used to create polycrystalline silicon strain bridges with excellent functions at a very reasonable price. The CVD structure is the most popular sensor in OEM applications due to its excellent price/performance ratio.

3. Sputtering Film Type - Sputtering Film Stacking or "Film") creates the most linear, hysteresis, and repeatable sensors. Accuracy can be as high as 0.08% of full scale, while long-term drift can be less than 0.06% of full scale per year.

4. MMS type 1 These sensors are processed by Kangli to detect the change of Leli, after 31SS diffuse flow, and fluid force, not affected by individual quality. MMS sensors are based on Xuebei's semiconductor manufacturing skills, which can achieve high pressure, good linearity, excellent thermal shock function and stability in compact sensor packaging.

5. The silicon strain gauge on the reverse side of the high-temperature glass powder sintering cavity is made of micro-melted glass, and the pressure chamber is processed with imported 17-4PH stainless steel, with no "0" ring, no weld and no leakage risk.

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