SIASUN Robot - the key technology of clean robots

Create Date: 2024-8-30 12:03:23|Source: SIASUN/SIASUN

(1) Clean lubrication technology: through the use of negative pressure dust suppression structure and non-volatile grease, no particle pollution to the environment is realized, and the cleanliness requirements are met.

(2) High-speed and stable control technology: through trajectory optimization and improvement of joint servo performance, the stability of clean handling is realized.

(3) Controller miniaturization technology: According to the high construction and operating costs of clean rooms, the space occupied by clean robots is reduced through controller miniaturization technology.

(4) Wafer detection technology: Through the optical sensor, the wafer in the cassette can be scanned to obtain information such as whether the wafer is missing or tilted in the cassette.
SIASUN Robot - the key technology of clean robots

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