Omron | Sub-micron ultra-high-speed microfabrication

problem

Adapt to high-end manufacturing

As consumer needs diversify and product cycles become shorter, various digital devices such as mobile devices are becoming more high-performance, small-size, and thin-shaped, and the manufacturing process of semiconductor packages and electronic components is changing dramatically.

As a result of these market changes, there is a need for "nanoscale microfabrication" of complex shapes, which was not possible in the past. There are two important points here.

1) High-speed cycle/synchronous control for high-precision micromachining

2) Freely combine the specifications of the peripherals with them

solution

The key to improving production efficiency is to balance high processing quality with high yield

The upgrade of manufacturing equipment and testing equipment has put forward requirements for the processing quality and high output of high-precision micromachining.

To this end, in addition to improving the processing performance of the mechanical controller, which is the core of device control, it is essential to combine peripheral devices (sensors and actuators) that match the specifications of the device and the degree of freedom of the control algorithm that makes full use of the performance of the device.

Omron's machine automation controller achieves high-speed computing performance, connection to various peripherals from multiple vendors, and the freedom of embedded software to achieve high processing quality and yield, and improve productivity.

Omron's strength

The controller has precision/high-speed motion synchronization control performance and a high degree of freedom to realize a wide range of ideas

The motion controller PMAC* is characterized by high-speed computing performance (less than 16.6 μs/axis), connectivity to multi-vendor peripherals, and freedom of embedded software. The potential of the PMAC is enormous for centralized control of all XY stages, current scanners and laser outputs.

* PMAC: Abbreviation for Programmable Multi Axis Controller

The implementation of the solution

One controller controls two units simultaneously

1) High-speed synchronization with a control cycle of 50μs/8 axes

It can feedback the detection value of the ultra-high-resolution linear scale in real time, and control the linear motor in a closed loop. By adjusting the control cycle (servo cycle), which has the greatest impact on trajectory accuracy, to 50 μs/8 axes, the synchronization of the XY axis can be achieved correctly.

In addition, it is equipped with servo algorithms such as position, speed, torque, and current closed-loop control, so that users can freely set the software to build a motion control system that matches the equipment specifications, accelerate the bottleneck process, and improve the output of the equipment.

Omron | Sub-micron ultra-high-speed microfabrication

　　The amount of irradiation is constant by synchronizing the trajectory velocity and laser output

2) Balanced processing quality

The uneven processing that occurs in laser processing is due to the uneven speed of the actual depiction of the laser. By controlling the laser output power synchronously with the vector speed of the laser, the amount of irradiation is kept constant, and the workpiece warping at the start/end positions and corners of the machining is prevented, and the workpiece warping caused by local overheating is prevented.

　　One trajectory command is divided into current control and stage control

3) Controlled by 1 trajectory command

Omron technology "Spectral Decomposition" synchronizes the actions of the XY stage and the current scanner, and when the desired trajectory program is executed, two commands are automatically assigned to the XY stage and the current scanner and run separately. A wide range of movements are assigned to the stage, and actions that require a high response are assigned to the current scanner, and a trajectory is traced in two movements, enabling continuous processing without stopping the stage.

High-speed seamless machining is possible, and both productivity and stable processing quality are achieved.

Omron | Sub-micron ultra-high-speed microfabrication

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