Mitsubishi Electric develops MEMS LiDAR solutions for autonomous vehicles

Create Date: 2024-8-30 12:03:23|Source: Mitsubishi Electric/Mitsubishi Electric

TOKYO, March 12, 2020 – Mitsubishi Electric Corporation (TSE: 6503) today announced that it has developed a compact Light Detection and Ranging (LiDAR) solution that integrates microelectromechanical systems (MEMS) that enable ultra-wide horizontal scanning angles to accurately detect the shape and distance of objects in front of it in autonomous driving systems. The new LiDAR solution generates a three-dimensional image of vehicles and pedestrians by illuminating an object with a laser and using a dual-axis (horizontal and vertical) MEMS mirror to scan the reflected light. Mitsubishi Electric hopes that this compact, low-cost solution will contribute to the realization of safe autonomous driving.

Mitsubishi Electric develops MEMS LiDAR solutions for autonomous vehicles Key features:
1) Large biaxial magnet mirror, unique lightweight design can achieve wide scanning angle
After the object is illuminated with a laser, the maximum amount of reflected light must be collected in order to obtain the most accurate 3D images, especially of vehicles and pedestrians. Therefore, LiDAR systems require mirrors with a large surface area to maximize light collection. In addition, a wide scanning angle is required for accurate vehicle perimeter monitoring. Mitsubishi Electric's new product features a lightweight design that integrates the industry's largest electromagnetic MEMS mirror with dimensions of 7mm x 5mm and the ability to scan both horizontally and vertically. Despite their size, the unique structure of MEMS mirrors helps to reduce weight without sacrificing rigidity. The lightweight design and the high electromagnetic drive enable the mirror to achieve a large horizontal movement of ± 15 degrees. The current vertical shift is ± 3.4 degrees, and Mitsubishi Electric aims to increase it to ±6.0 degrees or higher by improving the beam structure of the MEMS.
MEMS mirrors can be produced in large quantities on silicon substrates using semiconductor processing technology, making them suitable for mass production. In addition, it uses fewer parts than mirrors that are mechanically driven with motors, which will contribute to the durability of the LiDAR solution.
2) The optimized design supports downsizing and acquiring 3D images over a wide area
Mitsubishi Electric has optimized the arrangement of electromagnetic MEMS mirrors and optical components, including multiple laser light sources, photodetectors, and lenses, to suppress optical vignetting and avoid distortion of the laser beam by any of the LiDAR's internal components. The optimized design and optical transmit/receive mechanism enable an ultra-wide horizontal scanning angle, enhancing the ability to scan for vehicles in front or approaching, pedestrians crossing the street, traffic lights, traffic signs, and roadside obstacles. As it continues to evolve, Mitsubishi Electric aims to make vertical scanning angles of more than 25 degrees so that vehicles and pedestrians can be detected even in the vicinity.
Due to the optimal arrangement of signal processing circuits, power circuits and optical send/receive mechanisms, the volume of the LiDAR body is only 900 cc. Looking to the future, Mitsubishi Electric aims to develop ultra-small devices with a volume of only 350 cc or less.

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