The mass flow manipulator is a new type of flow measurement and monitoring instrument, as well as an instrument that can conveniently monitor the flow of different gases in pipelines without temperature and pressure compensation. The operating principle is to send the flow signal measured by the sensor heating bridge to the amplifier for expansion, compare the expanded flow detection voltage with the set voltage, expand the differential signal to control the conditioning valve, and perform closed-loop control of the flow through the channel. The flow rate is equal to the set flow rate. The flow indicator instrument used with the mass flow controller is equipped with a regulated power supply, a digital voltmeter, a setting potentiometer, a meter-inside switch, and a three-position valve switch. It can be used to handle different clean and dry gases, including corrosive gases and complex gases, but for the use of corrosive or complex gases, the correct type and sealing material need to be selected.
Mass Flow Meters (MFM) and Mass Flow Controllers (MFC) are used to accurately measure or manipulate the mass flow of gases. It plays a very important role in many fields, including many cutting-edge sciences and heavily applied skills, as well as in the field of basic industries. For example, the semiconductor industry in epitaxy, dispersion, vapor deposition, ion etching and other processes. Optical fiber preform smelting in the optical fiber industry, experimental research and application of petrochemical industry, multi-faceted research and application of data science and skills, such as the research of nano data, thin film data appearance skills, etc.; Quantitative sampling for environmental protection, carrier gas manipulation for spectroscopic and chromatographic analysis; medicine and bioengineering; Micro-reaction device, mixed gas distribution system, capillary measurement, etc.
Mass flow meters are used to measure the mass flow rate of gases, and their measured values do not require temperature and pressure correction. Conventional gas measurement usually uses a float flowmeter as the detection unit and a needle conditioning valve as the fulfillment unit. This method of flow manipulation has its drawbacks that are difficult to overcome. The float flowmeter not only has a low measurement accuracy, but also has a large measurement error when the temperature and pressure of the measuring medium are shaken, and the needle valve, as a fulfillment unit, can not accurately adjust the flow rate due to the manual operation required, and the detection unit constitutes a useful closed-loop control. Mass flow meters are largely unaffected. For the general volumetric flow meter, when the pressure changes by 0.1MPa relative to the standard pressure, the actual mass flow rate will change about twice under the same flow indication, while the mass flow meter will only change by about 0.1%F.S. In addition, the influence of temperature factors on the volumetric flow meter is also greater than that on the mass flow meter.
The mass flow controller consists of a flow sensor, a shunt channel, a flow conditioning valve, and an enlarged control circuit. Among them, the flow sensor is a key component in the mass flow meter and mass flow manipulator.
The technical functions of the sensor include: symmetry, linearity, repeatability, sensitivity, temperature drift, etc. Data and structure determine the function of the sensor, and the level of process is becoming more and more important. For example, the application of fillers, tightness, etc. At the same time, the flow sensor and the shunt and its matching with the expansion circuit will have a significant impact on the use of the flow sensor.
The flow signal measured by the sensor heating bridge is fed to the amplifier to expand, and the expanded flow detection voltage is compared with the set voltage, and then the difference signal is expanded to control the conditioning valve, and the flow rate through the channel is controlled in a closed loop to make it equal to the set flow rate. The shunt determines the flow of the main channel. The matching flow indicator is provided with a stabilized power supply, a digital voltmeter, a setting potentiometer, a transfer switch and a three-position valve control switch.
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