YASKAWA/Yaskawa SEMISTAR-MR124 Handling Robot Weight: 66kg

Introduction: Suitable for wafer handling SEMISTAR-M series upgrade, leading the industry in high performance! Supply of EFEM modules as a complete set of equipment. High-speed handling of 300 pieces/hour. Robots for handling semiconductor wafers

YASKAWA/Yaskawa SEMISTAR-MR124 Handling Robot Weight: 66kg

　　peculiarity

Large range of action: The EFEM module can move up to 4 sets of application equipment, without the use of a chassis, which greatly improves the handling efficiency.

High-speed handling: 300 pieces/hour

Application: 300mm-450mm wafer handling

parameter

　　Robotic arm

Applicable crystal size: 300mm(450m)*1

Crystal holding method: vacuum adsorption fixture or edge fixture

Standard edge effector length*2: Corresponding to the 345mm@300mm crystal

Number of drive shafts: 5 shafts

Arm Type: Single arm

Range of motion

R-axis telescopic*3: 1215mm

Theta axis gyration: 330°

Z-axis lifting: 480mm

B-axis rotation: 440°

Minimum turning radius * 2: 510mm

Maximum speed*2

Telescopic: 260°/s

Gyration: 330°/s

Lift: 550mm/s

B-axis rotation: 350°/s

Linearity: 2000mm/s

Repeatability*2: 0.1mm (P-P)

Mass: 66kg

　　Position adjuster

Applicable crystal size: 300mm

Crystal holding method: vacuum adsorption fixture

Check Out Object: Groove

Crystal Material: Element*4

Crystal edge detection sensor: LED + CCD linear sensor

Range of Motion: Maneuver: Unlimited

Max. Speed (Acceleration/Deceleration Time): Gyro: 1000°/s (0.1s/0.1s)

LINEMENT ACCURACY: ±0.03°

LINEMENT TIME: 1.7 SECONDS OR LESS

Mass: 5.8kg

　　Set up the environment

Cleanliness Class*5: ISO Class 1

Operating temperature· humidity: 20-30°C, 35-55%RH (no condensation)

Storage temperature· humidity: 0-40 °C, 35-80%RH (no condensation)

Elevation: 1000m or less of the surface height

Environment: No explosive, corrosive, flammable gases

MCBF: More than 1500 cycles

This article introduces YASKAWA/Yaskawa SEMISTAR-MR124 Handling Robot Weight: 66kg product, if you are interested in YASKAWA/Yaskawa Robot, please also contact our customer service, we are looking forward to your call, hope our technology and service can bring you a better experience.

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YASKAWA/Yaskawa SEMISTAR-MR124 Handling Robot Weight: 66kg

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