The mass flow manipulator is a new type of flow measurement and monitoring instrument, as well as an instrument that can conveniently monitor the activity of different gases in the pipeline without temperature and pressure compensation. The working principle is to send the flow signal measured by the heating bridge of the sensor to the amplifier for expansion, compare the expanded flow detection voltage with the set voltage, expand the differential signal to control the control valve, and perform closed-loop control of the flow through the channel. The flow rate is equal to the set flow rate. The flow indicator instrument used with the mass flow controller is equipped with a regulated power supply, a digital voltmeter, a setting potentiometer, a meter-inside switch, and a three-position valve switch. It can be used to manipulate different clean and dry gases, including corrosive gases and complex gases, but for the use of corrosive or complex gases, the correct selection of type and seal information is required.
Mass Flow Meters (MFM) and Mass Flow Controllers (MFC) are used to accurately measure or manipulate the mass flow of gases. It plays a very important role in many fields, including many cutting-edge sciences and major use skills, as well as in the field of basic industry. For example, the semiconductor industry in epitaxy, diffusion, vapor deposition, ion etching and other processes. Optical fiber preform smelting in the optical fiber industry, experimental research and use of petrochemical industry, research and use of data science and skills, such as research on nano data, thin film data surface skills, etc.; Quantitative sampling for environmental protection, carrier gas manipulation for spectroscopic and chromatographic analysis; medicine and bioengineering; Micro-reverberation device, mixed gas distribution system, capillary measurement, etc.
Mass flow meters are used to measure the mass flow rate of gases, and their measured values do not require temperature and pressure correction. Traditional gas measurement usually uses a float flowmeter as the detection unit and a needle control valve as the fulfillment unit. This method of flow manipulation has its drawbacks that are difficult to overcome. The float flowmeter not only has a low measurement accuracy, but also has a large measurement error when the temperature and pressure of the measuring medium fluctuate, and the needle valve of the fulfillment unit, because of the manual operation required, can not accurately adjust the flow rate, and the detection unit constitutes an effective closed-loop control. Mass flow meters are largely unaffected. For the general volumetric flow meter, when the pressure changes by 0.1MPa relative to the standard pressure, the actual mass flow rate will change about twice under the same flow indication, while the mass flow meter will only change by about 0.1% F.S. In addition, the influence of temperature factors on the volumetric flow meter is also greater than that on the mass flow meter.
The mass flow controller consists of a flow sensor, a shunt channel, a flow regulating valve, and an enlarged control circuit. Among them, the flow sensor is a key component in the mass flow meter and mass flow manipulator.
The technical functions of the sensor include: symmetry, linearity, repeatability, sensitivity, temperature drift, etc. The data and structure determine the function of the sensor, and the level of process is even more important. For example, the use of fillers, tightness, etc. Together, the flow sensor and the shunt and its matching with the enlargement circuit can have a significant impact on the use of the flow sensor.
The flow signal measured by the sensor heating bridge is sent to the amplifier to expand, and the expanded flow detection voltage is compared with the set voltage, and then the difference signal is expanded to control the regulating valve, and the flow rate through the channel is controlled in a closed loop to make it equal to the set flow rate. The shunt determines the flow of the main channel. The matching flow indicator is provided with a stabilized power supply, a digital voltmeter, a setting potentiometer, a transfer switch and a three-position valve control switch.
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