Introduction: The TTS series can be used with one robot to support EFEM from 2 FOUP to 3 FOUP without a walking device. Equipped with a drive part developed in-house by Kawasaki, it is capable of high-precision and high-rigidity operation. In addition, the upper and lower shafts are telescopic, so it can be used to move items to high or low places.
Features:
The characteristics of the NTS series, which can support 3FOUP, have been retained.
The upper and lower axles have a telescopic structure unique to Kawasaki and can be transported to the lowest and highest positions.
Compliant with SEMI-F47 standards.
SEMI-S2 compliant. Consider the environment and security.
Product parameters
Model: TTS10/TTS20
Structure: horizontal multi-articulating type, telescopic horizontal multi-articulating type
Arms: Single/Double
Degrees of freedom (axis): 4/5
Range of motion
θ1-axis :(Rotation・JT2) (°): 340
Z-axis (up and down, JT3) (mm): 740
θ2-axis (rotation/JT4) (°): 340
H1 axis (rotary・JT6) (°): 340
H2 axis ( JT7) (°): -/340
Maximum Reach (mm): 1,066
Repeatability (mm)✽1:±0.1 (Wafer Center)
Dust-free ✽ 2: ISO1 level
Control cabinets
D60: Teach pendant
Separation cable (1-5m) ✽ 4: Operation box
The company respects the enterprise spirit of "practicality, hard work and responsibility", and creates a good corporate environment with integrity, win-win, and business philosophy, and takes a new management model, perfect technology, thoughtful service, and excellent quality as the foundation for survival. We always adhere to: customer first, serve customers attentively, and insist on impressing customers with their own services. Always adhering to the business philosophy of "integrity, win-win", relying on excellent prices, excellent quality, fast delivery and pre-sales consultation and after-sales service to win the trust of our customers.
This article introduces the Kawasaki/Kawasaki Clean Robot TTS series repetitive ±0.1mm products, if you are interested in Kawasaki/Kawasaki robots, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.
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