Introduction: Titan1500C as a vacuum manipulator product in the field of LED chip manufacturing, large-load vacuum manipulator is mainly used in the process of LED chip manufacturing, to achieve the transmission of trays containing a large number of LED wafers between various process chambers, with high vacuum, high transmission efficiency, strong load capacity, high temperature resistance and other characteristics, greatly improving the yield and efficiency of LED chip manufacturing, is the key product of LED chip manufacturing equipment. On the basis of the vacuum manipulator for integrated circuit manufacturing, this product innovates its transmission structure and control law in response to its large load demand, so that it can reach a load capacity of 12kg, while maintaining a small occupied volume, maintaining high vacuum resistance and cleanliness level.
parameter
Structure: cylindrical coordinate type/SCARA type
Drive mode: servo motor
Number of hands: single arm
load
Name: Tray
Diameter: Φ716mm
Weight: ≤12kg
Degrees of freedom: 3
Arm length: 355mm
Finger length (mounting center to wafer center): 810mm
Range of motion
R-axis: ≤1500mm
θ-axisθ-: infinite rotation
Z-axis: 150mm
Minimum time for the whole trip
R轴R-:<27.8s(Home to Extend 1500mm)
θ-axisθ-:<15s(180°)
Z-axisZ-:13s(150mm)
Repeatability accuracy
R-axis: ±0.2mm
Theta axis: ±0.2mm
Z-axis: ±0.2mm
Minimum swing radius: 762.5mm
Amount of sag: 5mm
Vacuum: <5×10-9 Torr
Leak rate: <1×10-9 std.cc/sec He
Power supply: 208VAC (50Hz/60Hz)
Power supply range Voltage fluctuation range: single-phase AC 208V +10%, -15%
Communication interface: Ethernet
Weight: 195kg
Stroke: 1500mm
We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.
This article introduces SIASUN vacuum manipulator Titan1500C stroke: 1500mm product, if you are interested in SIASUN robot, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.
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