Introduction: It is used for FOUP automatic transportation and storage in the IC industry, and realizes the flow of wafers between core processes such as exposure and etching. Optimized structure and airflow field design, so that the cleanliness can meet the requirements of ISO Class 4 level; With rich safety design and sensitive collision protection function, it can effectively protect the safety of FOUP, wafer and personal safety, improve the safety level of the product, and reduce unnecessary losses; The new system motion logic planning improves the efficiency of product handling; The standard SEMI software interface can be easily connected to the MCS system of the panel factory, and various status data of the system can be reported in real time to realize intelligent management of the factory; The function and size of the equipment can be customized according to the special requirements of the customer's application.
parameter
Device: IC Stocker
Axis of motion: walking/lifting/rotating/forklifting
Payload: 10kg
Control: PLC+PC
Power supply: VAC 220V±10%
Motor: Servo motor
walk
Drive: rack and pinion + reducer + motor
Speed: 2.2m/s
hoist
Drive: motor reducer + synchronous belt + pulley
Speed: 1.75m/s
revolve
Drive: motor + synchronous belt + reducer
Speed: 120°/sec
Fork picking
Drive: motor reducer + synchronous belt + pulley
Loading/unloading time: 4.8s
Fork FOUP accuracy: ±0.5mm
We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.
This article introduces SIASUN IC STOCKER clean robot speed: 120°/sec products, if you are interested in SIASUN robot, please also contact our customer service, we are looking forward to your call, hope our technology and service can bring you a better experience.
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