Introduction: EFEM is a wafer front-end transfer device, which is an interface system compatible with SEMI standards, which can transfer wafers manually or horizontally with MR or OHT loaders. The system provides a single-wire interface for plant control, ample transmission spacing to interact with the plant, and a simple way for manual service. It occupies a small area, adopts a double-arm manipulator with an external shaft, and realizes pick-and-place through dual-axis compound movement, which greatly improves the efficiency of film transfer and reduces the product maintenance cost. The new internal gas diversion structure ensures that the cleanliness of the internal space can meet the ISO Class 1 level and ensure the cleanliness of the wafer transfer process. With multiple interlock protection inside, from software to hardware, multiple guarantees the safety of the wafer transfer process, personnel and equipment.
parameter
Material size: 200mm/300mm wafer
Alignment Mark:Notch/ Flat
Thickness: Standard wafer
Temperature: ≤200°C
Material in contact with the conveyor plate: Ceramic
Box specifications (type, manufacturer, number of segments, segment spacing, etc.): Foup/Adaptor
AMHS (Automated Material Handling System) Requirements: OHT
Alignment accuracy: ±0.1mm
Particle Spec:ISO Class 1
Throughput:>100wfrs/h
Number of Stages (LPs): 2
Load Lock
Number of Stages (LL): 2
Position (XYZ): Two LL
Wafer placement accuracy X-Y: ±0.1mm
Wafer Placement Angle Accuracy:/
Foot Print
W:≤2100
D:≤750
H:≤2500
Reference standard for the design of the whole machine: SEMI S1-701; SEMI S2-1102; SEMI S7-96; SEMI S8-701; SEMI S9-1101; SEMI S10-1296; SEMI S13-298; SEMI E15-698; SEMI S11-1296; SEMI E54-997; SEMI E58-301; SEMI F47-400
Software interface design reference standards: SEMI E30, E84
We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.
This article introduces SIASUN/SIASUN TTS-2000 EFEM Clean Robot Temperature: ≤200°C products, if you are interested in SIASUN robot, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.
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