SIASUN TTS-2000 EFEM Clean Robot Temperature: ≤200°C

Create Date: 2024-8-30 12:03:23|Source: SIASUN/SIASUN

  • Brand:
    SIASUN/SIASUN
    Origin:
    Shenyang
    Price:
    Please contact customer service
    Delivery time:
    Please contact customer service
    Model:
    TTS-2000 EFEM
    Product Introduction
    SIASUN TTS-2000 EFEM clean robot, temperature: ≤200°C, Alignment accuracy: ±0.1mm.
Product Description
Introduction: EFEM is a wafer front-end transfer device, which is an interface system compatible with SEMI standards, which can transfer wafers manually or horizontally with MR or OHT loaders. The system provides a single-wire interface for plant control, ample transmission spacing to interact with the plant, and a simple way for manual service. It occupies a small area, adopts a double-arm manipulator with an external shaft, and realizes pick-and-place through dual-axis compound movement, which greatly improves the efficiency of film transfer and reduces the product maintenance cost. The new internal gas diversion structure ensures that the cleanliness of the internal space can meet the ISO Class 1 level and ensure the cleanliness of the wafer transfer process. With multiple interlock protection inside, from software to hardware, multiple guarantees the safety of the wafer transfer process, personnel and equipment.
SIASUN TTS-2000 EFEM Clean Robot Temperature: ≤200°C
  parameter

Material size: 200mm/300mm wafer

  Alignment Mark:Notch/ Flat

Thickness: Standard wafer

Temperature: ≤200°C

Material in contact with the conveyor plate: Ceramic

Box specifications (type, manufacturer, number of segments, segment spacing, etc.): Foup/Adaptor

AMHS (Automated Material Handling System) Requirements: OHT

Alignment accuracy: ±0.1mm

  Particle Spec:ISO Class 1

  Throughput:>100wfrs/h

Number of Stages (LPs): 2

  Load Lock

Number of Stages (LL): 2

Position (XYZ): Two LL

Wafer placement accuracy X-Y: ±0.1mm

Wafer Placement Angle Accuracy:/

  Foot Print

  W:≤2100

  D:≤750

  H:≤2500

Reference standard for the design of the whole machine: SEMI S1-701; SEMI S2-1102; SEMI S7-96; SEMI S8-701; SEMI   S9-1101; SEMI S10-1296; SEMI S13-298; SEMI E15-698; SEMI S11-1296; SEMI   E54-997; SEMI E58-301; SEMI F47-400

Software interface design reference standards: SEMI E30, E84

We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.

This article introduces SIASUN/SIASUN TTS-2000 EFEM Clean Robot Temperature: ≤200°C products, if you are interested in SIASUN robot, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.

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