Introduction: Using advanced magnetic fluid sealing technology, it has the characteristics of low noise, low vibration, stable operation and high precision. It has a more sensitive collision protection function to effectively protect the robot and the customer's wafer. The new trajectory planning improves the movement rhythm and improves the user's productivity. Functions such as safety zone protection effectively improve the safety level of the product. It is widely used in high-end semiconductor front-end equipment, and has high requirements for equipment reliability. Flexible localization, customizable services, responsive after-sales service, and solid technical strength are our main competitiveness. It has promoted the progress of the domestic semiconductor industry chain and effectively supported the development of domestic equipment manufacturers.
parameter
Model: SRBZ820C-SMSX
Sealing method: magnetic fluid seal
Degrees of freedom: 2
load
Name: Tray
Diameter: Φ330mm
Weight: 1.5kg
Maximum range of motion
R-axis (mm): The distance between the center of the column and the center of the object to be carried at the maximum extension of the R-axis is 820
Theta axis (°): 360
Minimum time for the whole trip
R-axis (s): 2.5
Theta axis(s): 4.8
Repeatability accuracy
Theta axis(°):±0.01(3σ)
R-axis(mm):±0.1(3σ)
weight
The robot body: 41 kg
Controller: 15kg
Vacuum Resistance (Pa): <5×10-9 Torr
Leak rate: <1×10-9 std.cc/sec He
Collision protection: no damage to the platter and manipulator
Stroke: 820mm
Power supply range Voltage fluctuation range: single-phase AC 208V +10%, -15%
We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.
This article introduces SIASUN Clean Robot SRBZ820C-SMSX Controller: 15kg product, if you are interested in SIASUN robot, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.
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