Introduction: Coupling drive, servo drive, clean transmission and lubrication, SCARA arm structure, with the advantages of small space occupation, large expansion ratio, high precision, high cleanliness and so on. Catering to personalized design, finger and interface user customization, networked control system, high-efficiency transfer and collision protection function, SEMI certification S2, F47, MCBF more than 10 million times. Responsible for the automatic transfer of wafers between FOUPs, buffer chambers, process locations, etc. It is a superior choice for the semiconductor industry.
parameter
Structure: cylindrical coordinate type/SCARA type
load
Name: Wafer
Diameter: 2 inches/4 inches/6 inches/8 inches/12 inches
Weight: ≤0.5kg
Degrees of freedom: 5
Number of lots: 2
Maximum swing diameter: 580mm
Range of motion
Lifting shaft (Z-axis): 450mm
Rotary axis (T-axis): 270°
Extension shaft (R): R670mm
Beat
Lifting Shaft (Z-Axis): <1s (Home to Fullextension)
Rotary axis (T-axis): 0.7s/180°
Extension shaft (R1, R2): 1.2s/450mm
Repeatability accuracy
Lifting axis (Z-axis): ±0.1 mm (3σ)
Rotary axis (T-axis): ±0.006°(3σ)
Extension shaft (R1, R2): ±0.1 mm (3σ)
CLEANLINESS: CLASS 1
Weight of the main unit: 60 kg
Power supply: 208VAC (50Hz/60Hz)
Stroke: 670mm
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This article introduces SIASUN atmospheric manipulator Blade-SD210 stroke: 670mm product, if you are interested in SIASUN robot, please also contact our customer service, we are looking forward to your call, hope our technology and service can bring you a better experience.
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