SIASUN Atmospheric Manipulator Blade-SD210 Stroke: 670mm

Create Date: 2024-8-30 12:03:23|Source: SIASUN/SIASUN

  • Brand:
    SIASUN/SIASUN
    Origin:
    Shenyang
    Price:
    Please contact customer service
    Delivery time:
    Please contact customer service
    Model:
    Blade-SD210
    Product Introduction
    SIASUN Atmospheric Robot Blade-SD210 Stroke: 670 mm, Extension shaft (R1, R2): ±0.1 mm (3σ)
Product Description
Introduction: Coupling drive, servo drive, clean transmission and lubrication, SCARA arm structure, with the advantages of small space occupation, large expansion ratio, high precision, high cleanliness and so on. Catering to personalized design, finger and interface user customization, networked control system, high-efficiency transfer and collision protection function, SEMI certification S2, F47, MCBF more than 10 million times. Responsible for the automatic transfer of wafers between FOUPs, buffer chambers, process locations, etc. It is a superior choice for the semiconductor industry.
SIASUN Atmospheric Manipulator Blade-SD210 Stroke: 670mm
  parameter

Structure: cylindrical coordinate type/SCARA type

load

Name: Wafer

Diameter: 2 inches/4 inches/6 inches/8 inches/12 inches

Weight: ≤0.5kg

Degrees of freedom: 5

Number of lots: 2

Maximum swing diameter: 580mm

Range of motion

Lifting shaft (Z-axis): 450mm

Rotary axis (T-axis): 270°

Extension shaft (R): R670mm

Beat

Lifting Shaft (Z-Axis): <1s (Home to Fullextension)

Rotary axis (T-axis): 0.7s/180°

Extension shaft (R1, R2): 1.2s/450mm

Repeatability accuracy

Lifting axis (Z-axis): ±0.1 mm (3σ)

Rotary axis (T-axis): ±0.006°(3σ)

Extension shaft (R1, R2): ±0.1 mm (3σ)

CLEANLINESS: CLASS 1

Weight of the main unit: 60 kg

Power supply: 208VAC (50Hz/60Hz)

Stroke: 670mm

We will provide customers with high-quality products and satisfactory services with honest and trustworthy, convenient and fast business methods and strict management.

This article introduces SIASUN atmospheric manipulator Blade-SD210 stroke: 670mm product, if you are interested in SIASUN robot, please also contact our customer service, we are looking forward to your call, hope our technology and service can bring you a better experience.

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