Introduction: Atmospheric manipulators are widely used in silicon wafer and LED sapphire substrate handling. The optimized structure of the arm strengthens the rigidity of the arm and effectively suppresses vibration, and the lightweight design meets the requirements of high speed. The improvement of the manufacturing process of the main body effectively reduces costs and enhances market competitiveness. Materials, processing and surface treatments are optimized to achieve a high level of cleanliness. It has multiple security protection functions. Flexible elbow and wrist control allows the robot to pick and place wafers in any position, allowing more cassettes to be arranged in a straight line, saving space and making them more adaptable. It is an advantageous choice for the semiconductor industry.
parameter
Structure: Cylindrical Coordinate/SCARA
load
Diameter: Φ200mm/Φ300mm
Weight: ≤0.5kg
Degrees of freedom: 4
Maximum swing diameter: 425mm
Range of motion
Lifting shaft (Z-axis): 330mm
Axis of rotation (T-axis): 330°
Extension shaft (R1, R2): 820mm
Beat
Lift Shaft (Z-axis): <1s (Home to Extend 800mm)
Rotary axis (T-axis): 1s/180°
Extension shaft (R1, R2): 1.2s/330mm
Repeatability accuracy
Lifting axis (Z-axis): ±0.1 mm (3σ)
Rotary axis (T-axis): ±0.006° (3σ)
Extension shaft (R1, R2): ±0.1 mm (3σ)
Stroke: 820mm
CLEANLINESS: ISO CLASS 1
Weight of the main unit: 70 kg
Power supply: 208VAC (50Hz/60Hz)
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This article introduces SIASUN atmospheric manipulator Blade-DD250 weight: ≤0.5kg product, if you are interested in SIASUN robot, please also contact our customer service, we look forward to your call, hope our technology and service can bring you a better experience.
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