Who is the real "professional scavenger" when it comes to wafer pollution prevention? - Festo

Create Date: 2024-8-30 12:03:23|Source: Festo

Not long ago, the 2023 Semicon China exhibition ended successfully in a warm atmosphere. During the exhibition, the Festo booth was crowded with people, and many "Fei family stars" attracted the attention of countless visitors with their ability to demonstrate in semiconductor manufacturing. Among them, the "professional scavenger" N2 Purge nitrogen purge system, which focuses on wafer protection, has attracted much attention.

How to solve the problem of anti-pollution that plagues semiconductor manufacturers?

Is it the key to improving wafer yield?

Is it possible that an efficient solution is simply available?

The secret of manufacturing is revealed with one click

In semiconductor manufacturing, transportation and storage processes are critical points of protection. Oxygen, moisture, and gaseous molecular contaminants are hidden everywhere, ready to cause structural damage to the wafer.
Who is the real "professional scavenger" when it comes to wafer pollution prevention? - Festo
cost

Festo offers pre-assembled functional units, which not only reduce the user's additional costs in terms of accessories, but also in terms of assembly, tubing and testing.

security

The complete system solution has only two pneumatic interfaces, which reduces the risk of gas leakage.

precision

Festo proportional flow controllers include control valves with proportional orientation and piezo valves for reliable and precise control of different flow rates.

The system's closed control loop ensures accurate and stable flow and hysteresis-free linear behavior. The flow measurement technology based on the Bernoulli effect allows the flow rate to be extremely stable even when the upstream pressure is transient.

Service life

The piezoelectric proportional valve does not generate heat, no magnetic field, and basically does not produce noise when working. It is designed to avoid airflow contamination caused by particle wear throughout its service life, thereby preventing abrasion caused by friction and significantly extending the life of the valve.

Energy consumption

Proportional flow control valves with piezoelectric technology only require current in the active state and do not need to be energized in the standby state. Compared to current valves, piezoelectric proportional valves can reduce energy consumption by up to 95%.

volume

Thanks to its small size, compact size and lightweight construction, the complete system solution is particularly suitable for use in production areas where space is limited where the operating equipment is strictly restricted.

Functional richness

Purging and vacuum functions are integrated in a single system to enrich their functional value; The flow controller can be integrated into the overhead transport system for flexible applications.

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