KEYENCE × classic case sharing in the semiconductor industry

Create Date: 2024-8-30 12:03:23|Source: KEYENCE

In the fast-growing semiconductor industry, KEYENCE is trusted for its excellent performance in all stages of wafer production. In this issue, we will share with you the classic basic detection applications of KEYENCE sensors in the semiconductor industry.

OHT safety protection detection when handling FOUP

Solution: GL-S series advantages: slim body and built-in mounting bracket, lightweight and space-saving. The optical axis alignment is simple, equipped with a large indicator light, and the safety status is clear at a glance!

Stage Wafer presence detection

Solution: FS-N41N+FU-96T Advantages: The high-power amplifier can effectively prevent false detection caused by water droplets, and can effectively prevent corrosion with fluorine resin optical fiber housing.

Wafer coating/developing resist droplet management

Solution: FD-X series

Advantages: Clamp-on installation does not require pipe cutting, no contamination problems, convenient and safe. At the same time, the cumulative flow rate of 0.001m1 can be displayed, which is convenient for dose control

Wafer protrusion detection in a diffusion furnace

Solution: GV-21+GV-H450 Advantages: It supports transparent window detection, and the reflective type is easy to install. One side of the window is sufficient.

AWC Wafer Positioning Inspection
KEYENCE × classic case sharing in the semiconductor industry
Solution: FS-N41N+FU-79 /LV-NH62 Advantages: High-sensitivity amplifier, fast response speed, with 0.5mm small core diameter fiber, stable wafer positioning detection. If the laser type is used, the 1.5mm spot in the LV series can reach a detection distance of 1M. The coaxial structure of the laser sensor can solve the problem of small installation position.

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